Issued Patents All Time
Showing 101–105 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7517639 | Seal ring arrangements for immersion lithography systems | Burn Jeng Lin, Tsai-Sheng Gau, Ru-Gun Liu, Shinn-Sheng Yu, Jen-Chieh Shih | 2009-04-14 |
| 7180572 | Immersion optical projection system | Jen-Chieh Shih, Burn Jeng Lin, Tsai-Sheng Gau, Ru-Gun Liu, Chin-Hsiang Lin +1 more | 2007-02-20 |
| 7091502 | Apparatus and method for immersion lithography | Tsai-Sheng Gau, Ru-Gun Liu, Burn Jeng Lin | 2006-08-15 |
| 6973636 | Method of defining forbidden pitches for a lithography exposure tool | Jaw-Jung Shin, Tsai-Sheng Gau, Burn Jeng Lin, Li-Chun Tien, Mi-Chang Chang +4 more | 2005-12-06 |
| 6914525 | Alert system and method for geographic or natural disasters utilizing a telecommunications network | Herman Chunghwa Rao, Ching-Hsiang Hsu, Jung Nan Hung, Chih-Kung Lee, Wen-Jong Wu +3 more | 2005-07-05 |