Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559049 | All dual damascene oxide etch process steps in one confined plasma chamber | Lawrence Shao-hsien Chen, Young-Tong Tsai, Francis Ko, Chuan-Kai Lo | 2003-05-06 |
| 5286667 | Modified and robust self-aligning contact process | Jiunn-Jyi Lin, Lih-Shyng Tsai, Hsien-Wen Chang | 1994-02-15 |