Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276449 | Method for forming fin field effect transistor (FinFET) device structure | Chung-Shu Wu, Ying-Ya Hsu, Shu-Uei Jang, Yu-Wen Wang, Ryan Chia-Jen Chen | 2019-04-30 |
| 9449821 | Composite hard mask etching profile for preventing pattern collapse in high-aspect-ratio trenches | Zusing Yang | 2016-09-20 |
| 9349746 | Method of fabricating deep trench semiconductor devices, and deep trench semiconductor devices | Ta-Hone Yang, Nan-Tsu Lian, Sheng-Yuan Chang, Kuang-Chao Chen | 2016-05-24 |
| 9252153 | Method of word-line formation by semi-damascene process with thin protective conductor layer | Cheng-Yi Lung, Ta-Hung Yang | 2016-02-02 |
| 9190467 | Semiconductor structure and manufacturing method of the same | Erh-Kun Lai, Guan-Ru Lee, Hang-Ting Lue | 2015-11-17 |
| 8076230 | Method of forming self-aligned contacts and local interconnects | — | 2011-12-13 |
| 7723229 | Process of forming a self-aligned contact in a semiconductor device | Chung-Tai Chen | 2010-05-25 |
| 7575990 | Method of forming self-aligned contacts and local interconnects | — | 2009-08-18 |
| 7410593 | Plasma etching methods using nitrogen memory species for sustaining glow discharge | Hong-Ji Lee, Shih-Ping Hong | 2008-08-12 |