Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9869712 | Method and system for detecting defects of wafer by wafer sort | Tuung Luoh, I-Jen Huang, Ling Yang, Kuang-Chao Chen | 2018-01-16 |
| 9589086 | Method for measuring and analyzing surface structure of chip or wafer | Tuung Luoh, Hsiang-Chou Liao, Ling Yang, Kuang-Chao Chen | 2017-03-07 |
| 9466610 | Method of fabricating three-dimensional gate-all-around vertical gate structures and semiconductor devices, and three-dimensional gate-all-round vertical gate structures and semiconductor devices thereof | — | 2016-10-11 |
| 9349746 | Method of fabricating deep trench semiconductor devices, and deep trench semiconductor devices | Nan-Tsu Lian, An Chyi Wei, Sheng-Yuan Chang, Kuang-Chao Chen | 2016-05-24 |
| 9305794 | Etching method and etching composition | — | 2016-04-05 |
| 9244112 | Method for detecting an electrical defect of contact/via plugs | Hsiang-Chou Liao, Tuung Luoh, Ling Yang, Kuang-Chao Chen | 2016-01-26 |
| 9116108 | Electron beam inspection optimization | Tuung Luoh, Ling Yang, Kuang-Chao Chen | 2015-08-25 |
| 9006003 | Method of detecting bitmap failure associated with physical coordinate | Tuung Luoh, Chi-Min Chen, Ling Yang, Kuang-Chao Chen | 2015-04-14 |
| 8669184 | Method for improving flatness of a layer deposited on polycrystalline layer | Tuung Luoh, Ling-Wu Yang, Kuang-Chao Chen | 2014-03-11 |
| 8594963 | In-line inspection yield prediction system | Hsiang-Chou Liao, Che-Lun Hung, Tuung Luoh, Ling Yang, Kuang-Chao Chen | 2013-11-26 |