Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7723229 | Process of forming a self-aligned contact in a semiconductor device | An Chyi Wei | 2010-05-25 |
| 6746970 | Method of forming a fluorocarbon polymer film on a substrate using a passivation layer | Ming-Chung Liang, Hsin-Yi Tsai | 2004-06-08 |
| 6627001 | Method for cleaning a semiconductor wafer | — | 2003-09-30 |
| 6579812 | Method for removing residual polymer after the dry etching process and reducing oxide loss | — | 2003-06-17 |
| 6524965 | Cleaning method for semiconductor manufacturing process to prevent metal corrosion | — | 2003-02-25 |
| 6417095 | Method for fabricating a dual damascene structure | — | 2002-07-09 |