Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404250 | Plasma etcher edge ring with a chamfer geometry and impedance design | Chien-Yu Wang, Hung-Bin Lin, Shih-Hao Chen, Chen-Hsiang Lu, Ping-Chung LEE | 2022-08-02 |
| 10607848 | Method of fabricating semiconductor device | Yuan-Chieh Chiu, Kuang-Chao Chen, Yen-Ju Chen | 2020-03-31 |
| 10020184 | Method for cleaning substrate | Yu-Cheng Liu | 2018-07-10 |
| 9985023 | Structure and formation method of semiconductor device structure | Fa-Chih Liu | 2018-05-29 |
| 9953841 | Semiconductor device and method of fabricating the same | Yuan-Chieh Chiu, Kuang-Chao Chen, Yen-Ju Chen | 2018-04-24 |
| 9905509 | Inverted-T shaped via for reducing adverse stress-migration effects | Yen-Lu Chen, Ta-Hung Yang | 2018-02-27 |
| 9825052 | Memory device and method of forming the same | Yao-An Chung | 2017-11-21 |
| 9595448 | Method for cleaning plasma processing chamber and substrate | Yu-Cheng Liu | 2017-03-14 |
| 9589979 | Vertical and 3D memory devices and methods of manufacturing the same | — | 2017-03-07 |
| 9559049 | Memory device and method of manufacturing the same | Yuan-Chieh Chiu, Yao-An Chung | 2017-01-31 |
| 9418939 | Contact structure for NAND based non-volatile memory device and a method of manufacture | Ming-Tsung Wu | 2016-08-16 |
| 9299667 | Method of shaping densely arranged PL gates and peripheral MOS gates for ILD oxide fill-in | Fang-Hao Hsu, Hong-Ji Lee | 2016-03-29 |
| 8748323 | Patterning method | Han-Hui Hsu, An-Chi Wei, Ming-Tsung Wu | 2014-06-10 |
| 8697340 | Semiconductor structure and method of fabricating the same | Hong-Ji Lee, Fang-Hao Hsu | 2014-04-15 |
| 8440576 | Method for pitch reduction in integrated circuit fabrication | — | 2013-05-14 |
| 8298952 | Isolation structure and formation method thereof | Ming-Tsung Wu, Chun-Min Cheng, Yu-Chung Chen, Han-Hui Hsu | 2012-10-30 |
| 8294278 | Methods for pitch reduction | — | 2012-10-23 |
| 8120140 | Isolation structure and formation method thereof | Ming-Tsung Wu, Chun-Min Cheng, Yu-Chung Chen, Han-Hui Hsu | 2012-02-21 |
| 8106519 | Methods for pitch reduction | — | 2012-01-31 |
| 7960835 | Fabrication of metal film stacks having improved bottom critical dimension | Han-Hui Hsu, Ta-Hung Yang, Ming-Tsung Wu, An-Chi Wei, Ching-Hsiung Li +1 more | 2011-06-14 |
| 7723240 | Methods of low temperature oxidation | Han-Hui Hsu | 2010-05-25 |
| 7410593 | Plasma etching methods using nitrogen memory species for sustaining glow discharge | Hong-Ji Lee, An Chyi Wei | 2008-08-12 |
| 7314815 | Manufacturing method of one-time programmable read only memory | Chia-Hua Ho, Yen-Hao Shih, Hsiang-Lan Lung, Shih-Chin Lee | 2008-01-01 |
| 7279114 | Method for stabilizing etching performance | — | 2007-10-09 |
| 7183205 | Method of pitch dimension shrinkage | — | 2007-02-27 |