Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404250 | Plasma etcher edge ring with a chamfer geometry and impedance design | Chien-Yu Wang, Hung-Bin Lin, Shih-Ping Hong, Shih-Hao Chen, Chen-Hsiang Lu | 2022-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404250 | Plasma etcher edge ring with a chamfer geometry and impedance design | Chien-Yu Wang, Hung-Bin Lin, Shih-Ping Hong, Shih-Hao Chen, Chen-Hsiang Lu | 2022-08-02 |