EM

Etsurou Morita

SU Sumco: 13 patents #22 of 464Top 5%
Overall (All Time): #385,657 of 4,157,543Top 10%
13
Patents All Time

Issued Patents All Time

Showing 1–13 of 13 patents

Patent #TitleCo-InventorsDate
8284395 Wafer surface measuring apparatus Eiji Kamiyama 2012-10-09
8110486 Method of manufacturing semiconductor wafer by forming a strain relaxation SiGe layer on an insulating layer of SOI wafer Koji Matsumoto, Tomoyuki Hora, Akihiko Endo, Masaharu Ninomiya 2012-02-07
8048769 Method for producing bonded wafer Nobuyuki Morimoto, Akihiko Endo 2011-11-01
7960225 Method of controlling film thinning of semiconductor wafer for solid-state image sensing device Akihiko Endo, Yoshihisa Nonogaki, Hideki Nishihata 2011-06-14
7951716 Wafer and method of producing the same Kazuo Hujie, Isoroku Ono 2011-05-31
7855129 Method for manufacturing direct bonded SOI wafer and direct bonded SOI wafer manufactured by the method Shinji Okawa, Isoroku Ono 2010-12-21
7829436 Process for regeneration of a layer transferred wafer and regenerated layer transferred wafer Shinji Okawa, Isoroku Ono 2010-11-09
7781309 Method for manufacturing direct bonded SOI wafer and direct bonded SOI wafer manufactured by the method Shinji Okawa, Isoroku Ono 2010-08-24
7736998 Silicon-on insulator substrate and method for manufacturing the same Ritarou Sano, Akihiko Endo 2010-06-15
7718507 Bonded wafer and method of producing the same Kazuo Hujie, Isoroku Ono 2010-05-18
7416960 Method for manufacturing SOI substrate Akihiko Endo, Tatsumi Kusaba, Hidehiko Okuda 2008-08-26
7364984 Method for manufacturing SOI substrate Akihiko Endo, Tatsumi Kusaba, Hidehiko Okuda 2008-04-29
7354844 Method for manufacturing SOI substrate Akihiko Endo, Tatsumi Kusaba, Hidehiko Okuda 2008-04-08