| 7939441 |
P-type silicon wafer and method for heat-treating the same |
Tatsumi Kusaba |
2011-05-10 |
| 7767549 |
Method of manufacturing bonded wafer |
Tatsumi Kusaba, Akihiko Endo |
2010-08-03 |
| 7763541 |
Process for regenerating layer transferred wafer |
Akihiko Endo, Tatsumi Kusaba |
2010-07-27 |
| 7745306 |
Method for producing bonded wafer |
Tatsumi Kusaba |
2010-06-29 |
| 7541663 |
P-type silicon wafer and method for heat-treating the same |
Tatsumi Kusaba |
2009-06-02 |
| 7416960 |
Method for manufacturing SOI substrate |
Akihiko Endo, Tatsumi Kusaba, Etsurou Morita |
2008-08-26 |
| 7364984 |
Method for manufacturing SOI substrate |
Akihiko Endo, Tatsumi Kusaba, Etsurou Morita |
2008-04-29 |
| 7354844 |
Method for manufacturing SOI substrate |
Akihiko Endo, Tatsumi Kusaba, Etsurou Morita |
2008-04-08 |
| 7311775 |
Method for heat-treating silicon wafer and silicon wafer |
Tatsumi Kusaba, Yoshihisa Nonogaki |
2007-12-25 |