| 8283252 |
Method of manufacturing semiconductor wafer |
Toru Taniguchi, Etsuro Morita, Satoshi Matagawa, Seiji Harada, Mitsuhiro Endo +1 more |
2012-10-09 |
| 7951716 |
Wafer and method of producing the same |
Etsurou Morita, Kazuo Hujie |
2011-05-31 |
| 7855129 |
Method for manufacturing direct bonded SOI wafer and direct bonded SOI wafer manufactured by the method |
Etsurou Morita, Shinji Okawa |
2010-12-21 |
| 7829436 |
Process for regeneration of a layer transferred wafer and regenerated layer transferred wafer |
Etsurou Morita, Shinji Okawa |
2010-11-09 |
| 7781309 |
Method for manufacturing direct bonded SOI wafer and direct bonded SOI wafer manufactured by the method |
Etsurou Morita, Shinji Okawa |
2010-08-24 |
| 7718507 |
Bonded wafer and method of producing the same |
Etsurou Morita, Kazuo Hujie |
2010-05-18 |
| 7713842 |
Method for producing bonded wafer |
Hideki Nishihata, Akihiko Endo |
2010-05-11 |
| 7589023 |
Method of manufacturing semiconductor wafer |
Toru Taniguchi, Etsuro Morita, Satoshi Matagawa, Seiji Harada, Mitsuhiro Endo +1 more |
2009-09-15 |
| 7470169 |
Method of polishing semiconductor wafers by using double-sided polisher |
Toru Taniguchi, Seiji Harada |
2008-12-30 |