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Piezoelectric micromachined ultrasonic transducer |
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Process for manufacturing a microelectromechanical interaction system for a storage medium |
Giuseppe Barillaro, Alessandro Diligenti, Caterina Riva, Stefano Losa |
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| 10196262 |
Process for manufacturing a microelectromechanical interaction system for a storage medium |
Giuseppe Barillaro, Alessandro Diligenti, Caterina Riva, Stefano Losa |
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Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device |
Stefano Losa, Raffaella Pezzuto, Matteo Perletti, Luigi Esposito, Mikel Azpeitia Urquia |
2017-11-21 |
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Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device |
Stefano Losa, Raffaella Pezzuto, Matteo Perletti, Luigi Esposito, Mikel Azpeitia Urquia |
2017-09-12 |
| 9388038 |
Micro-electro-mechanical device with buried conductive regions, and manufacturing process thereof |
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Process for manufacturing a membrane microelectromechanical device, and membrane microelectromechanical device |
Pietro Corona, Marco Ferrera, Igor Varisco |
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| 8998388 |
Method for manufacturing a fluid ejection device and fluid ejection device |
Mauro Cattaneo, Igor Varisco |
2015-04-07 |
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Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby |
Pietro Corona, Stefano Losa, Ilaria Gelmi |
2013-01-01 |