| 9162876 |
Process for manufacturing a membrane microelectromechanical device, and membrane microelectromechanical device |
Marco Ferrera, Igor Varisco, Roberto Campedelli |
2015-10-20 |
| 9105690 |
Process for manufacturing a semiconductor wafer having SOI-insulated wells and semiconductor wafer thereby manufactured |
Gabriele Barlocchi, Flavio Francesco Villa |
2015-08-11 |
| 8575710 |
Capacitive semiconductor pressure sensor |
Flavio Francesco Villa, Gabriele Barlocchi, Benedetto Vigna, Lorenzo Baldo |
2013-11-05 |
| 8420428 |
Method for forming buried cavities within a semiconductor body, and semiconductor body thus made |
Gabriele Barlocchi, Dino Faralli, Flavio Francesco Villa |
2013-04-16 |
| 8344466 |
Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby |
Stefano Losa, Ilaria Gelmi, Roberto Campedelli |
2013-01-01 |
| 8334188 |
Process for manufacturing a wafer by annealing of buried channels |
Flavio Francesco Villa, Gabriele Barlocchi |
2012-12-18 |
| 8173513 |
Method for manufacturing a semiconductor pressure sensor |
Flavio Francesco Villa, Gabriele Barlocchi, Benedetto Vigna, Lorenzo Baldo |
2012-05-08 |
| 8008738 |
Integrated differential pressure sensor |
Flavio Francesco Villa, Gabriele Barlocchi, Lorenzo Baldo |
2011-08-30 |
| 7906406 |
Process for manufacturing a semiconductor wafer having SOI-insulated wells and semiconductor wafer thereby manufactured |
Gabriele Barlocchi, Flavio Francesco Villa |
2011-03-15 |
| 7871894 |
Process for manufacturing thick suspended structures of semiconductor material |
Flavio Francesco Villa, Gabriele Barlocchi |
2011-01-18 |
| 7846811 |
Process for manufacturing a high-quality SOI wafer |
Flavio Francesco Villa, Gabriele Barlocchi |
2010-12-07 |
| 7811848 |
Method for forming buried cavities within a semiconductor body, and semiconductor body thus made |
Gabriele Barlocchi, Dino Faralli, Flavio Francesco Villa |
2010-10-12 |
| 7763487 |
Integrated differential pressure sensor and manufacturing process thereof |
Flavio Francesco Villa, Gabriele Barlocchi, Lorenzo Baldo |
2010-07-27 |
| 7754578 |
Process for manufacturing a wafer by annealing of buried channels |
Flavio Francesco Villa, Gabriele Barlocchi |
2010-07-13 |
| 7678600 |
Process for manufacturing a membrane of semiconductor material integrated in, and electrically insulated from, a substrate |
Flavio Francesco Villa, Chantal Combi, Lorenzo Baldo, Gabriele Barlocchi |
2010-03-16 |
| 7452713 |
Process for manufacturing a microfluidic device with buried channels |
Gabriele Barlocchi, Ubaldo Mastromatteo, Flavio Francesco Villa |
2008-11-18 |
| 7294536 |
Process for manufacturing an SOI wafer by annealing and oxidation of buried channels |
Flavio Francesco Villa, Gabriele Barlocchi |
2007-11-13 |
| 7071073 |
Process for manufacturing low-cost and high-quality SOI substrates |
Flavio Francesco Villa, Gabriele Barlocchi |
2006-07-04 |
| 6992367 |
Process for forming a buried cavity in a semiconductor material wafer and a buried cavity |
Pietro Erratico, Enrico Sacchi, Flavio Francesco Villa, Gabriele Barlocchi |
2006-01-31 |
| 6759132 |
Method for the manufacture of electromagnetic radiation reflecting devices |
Ubaldo Mastromatteo, Flavio Francesco Villa, Gabriele Barlocchi |
2004-07-06 |
| 6693039 |
Process for forming a buried cavity in a semiconductor material wafer and a buried cavity |
Pietro Erratico, Enrico Sacchi, Flavio Francesco Villa, Gabriele Barlocchi |
2004-02-17 |
| 6376291 |
Process for manufacturing buried channels and cavities in semiconductor material wafers |
Gabriele Barlocchi, Flavio Francesco Villa |
2002-04-23 |
| 6362070 |
Process for manufacturing a SOI wafer with buried oxide regions without cusps |
Flavio Francesco Villa, Gabriele Barlocchi |
2002-03-26 |