Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137592 | Micromechanical mirror structure with improved mechanical and reflectivity features and corresponding manufacturing process | Luca LAMAGNA, Silvia Rossini, Federico VERCESI, Elena Cianci, Graziella Tallarida +1 more | 2021-10-05 |
| 10221066 | Process for manufacturing a microelectromechanical interaction system for a storage medium | Giuseppe Barillaro, Alessandro Diligenti, Caterina Riva, Roberto Campedelli | 2019-03-05 |
| 10196262 | Process for manufacturing a microelectromechanical interaction system for a storage medium | Giuseppe Barillaro, Alessandro Diligenti, Caterina Riva, Roberto Campedelli | 2019-02-05 |
| 10057684 | Integrated electroacoustic MEMS transducer with improved sensitivity and manufacturing process thereof | Matteo Perletti, Lorenzo TENTORI, Maria Carolina TURI | 2018-08-21 |
| 9824882 | Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device | Raffaella Pezzuto, Roberto Campedelli, Matteo Perletti, Luigi Esposito, Mikel Azpeitia Urquia | 2017-11-21 |
| 9758373 | Method for manufacturing a protective layer against HF etching, semiconductor device provided with the protective layer and method for manufacturing the semiconductor device | Raffaella Pezzuto, Roberto Campedelli, Matteo Perletti, Luigi Esposito, Mikel Azpeitia Urquia | 2017-09-12 |
| 9388038 | Micro-electro-mechanical device with buried conductive regions, and manufacturing process thereof | Roberto Campedelli, Raffaella Pezzuto, Marco Mantovani, Mikel AZPEITIA URQUIA | 2016-07-12 |
| 8344466 | Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby | Pietro Corona, Ilaria Gelmi, Roberto Campedelli | 2013-01-01 |