Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby

Process for manufacturing MEMS devices having buried cavities and MEMS device obtained thereby

US Patent 8344466 · Granted Jan 1, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for manufacturing a capacitive pressure sensor and capacitive pressure se2025
Semiconductor device and method for manufacturing a semiconductor device2024
Piezoelectric micromachined ultrasonic transducer2024
Process for manufacturing a micro-electro-mechanical device, and MEMS device2024
Micromechanical mirror structure with improved mechanical and reflectivity featu2021
Dry scribing methods, devices and systems2019
Process for manufacturing a microelectromechanical interaction system for a stor2019
Process for manufacturing a microelectromechanical interaction system for a stor2019
Process for manufacturing a microelectromechanical interaction system for a stor2019
Process for manufacturing a microelectromechanical interaction system for a stor2019
Integrated electroacoustic MEMS transducer with improved sensitivity and manufac2018
Method for manufacturing a protective layer against HF etching, semiconductor de2017