Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process for manufacturing a micro-electro-mechanical device, and MEMS device

Process for manufacturing a micro-electro-mechanical device, and MEMS device

US Patent 11945712 · Granted Apr 2, 2024

Estimated economic value: $13,662,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

MEMS gyroscope having quadrature compensation electrodes and method for compensa2025
Process for manufacturing a combined microelectromechanical device and correspon2025
Microelectromechanical sensor device with improved stability to stress2024
Semiconductor device and method for manufacturing a semiconductor device2024
Hermetically sealed MEMS mirror and method of manufacture2024
Waterproof MEMS button device, input device comprising the MEMS button device an2024
Piezoelectric micromachined ultrasonic transducer2024
Method for manufacturing a silicon-based coriolis-force-based flow sensing devic2024
Closed-loop microelectromechanical accelerometer with compensation of spurious v2024
Appliance with capacitive humidity sensor2024
Ultrasonic MEMS acoustic transducer with reduced stress sensitivity and manufact2024
Ultrasonic MEMS acoustic transducer with reduced stress sensitivity and manufact2024