| 9911641 |
Process for manufacturing a semiconductor substrate, and semiconductor substrate obtained |
Roland Brun, Olivier Ledoux, Eric Butaud |
2018-03-06 |
| 9799549 |
Process for manufacturing a composite structure |
Sebastien Kerdiles, Guillaume Chabanne, Aurelia Pierret, Xavier Schneider, Didier Landru |
2017-10-24 |
| 9768057 |
Method for transferring a layer from a single-crystal substrate |
Ludovic Ecarnot, Nicolas Daval, Nadia Ben Mohamed, Carole David, Isabelle Guerin |
2017-09-19 |
| 9190284 |
Process for treating a semiconductor-on-insulator structure for improving thickness uniformity of the semiconductor layer |
Walter Schwarzenbach, Carine Duret |
2015-11-17 |
| 9082819 |
Process for thinning the active silicon layer of a substrate of “silicon on insulator” (SOI) type |
Sebastien Kerdiles |
2015-07-14 |
| 7939427 |
Process for fabricating a substrate of the silicon-on-insulator type with reduced roughness and uniform thickness |
Eric Neyret |
2011-05-10 |