Issued Patents All Time
Showing 26–50 of 76 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8003540 | Method for manufacturing semiconductor device | — | 2011-08-23 |
| 7989145 | Method for forming fine pattern of semiconductor device | Ki Lyoung Lee | 2011-08-02 |
| 7972766 | Method for forming fine pattern of semiconductor device | — | 2011-07-05 |
| 7910291 | Method for manufacturing semiconductor device using immersion lithography process | Hyun Sook Jun, Tae Seung Eom | 2011-03-22 |
| 7838201 | Method for manufacturing a semiconductor device | Jae Chang Jung, Chang Moon Lim, Seung Chan Moon | 2010-11-23 |
| 7776747 | Semiconductor device and method for forming pattern in the same | Keun Do Ban, Jun Sun | 2010-08-17 |
| 7615497 | Forming fine pattern of semiconductor device using three mask layers and CMP of spin-on carbon layer | Keun Do Ban | 2009-11-10 |
| 7576009 | Method for forming fine pattern of semiconductor device | Ki Lyoung Lee, Keun Do Ban | 2009-08-18 |
| 7550384 | Semiconductor device and method for forming pattern in the same | Keun Do Ban | 2009-06-23 |
| 7550362 | Method for manufacturing semiconductor device | Keun Do Ban | 2009-06-23 |
| 7534548 | Polymer for immersion lithography and photoresist composition | Jae Chang Jung, Chang Moon Lim, Seung Chan Moon | 2009-05-19 |
| 7494935 | Method for forming fine pattern of semiconductor device | Jae Chang Jung, Seung Chan Moon, Myoung Ja Min, Keun Do Ban, Hee Youl Lim | 2009-02-24 |
| 7467632 | Method for forming a photoresist pattern | Geun Su Lee | 2008-12-23 |
| 7462439 | Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same | Jae Chang Jung, Chang Moon Lim, Seung Chan Moon | 2008-12-09 |
| 7419760 | Top anti-reflective coating composition, method for forming the pattern of a semiconductor device using the same, and semiconductor device comprising the pattern | Jae Chang Jung, Sam Young Kim, Chang Moon Lim, Seung Chan Moon | 2008-09-02 |
| 7381519 | Top anti-reflective coating polymer, its preparation method and top anti-reflective coating composition comprising the same | Jae Chang Jung, Chang Moon Lim, Seung Chan Moon | 2008-06-03 |
| 7303858 | Photoacid generating polymer, its preparation method, top anti-reflective coating composition comprising the same, method of forming a pattern in a semiconductor device, and semiconductor device | Jae Chang Jung, Chang Moon Lim, Seung Chan Moon | 2007-12-04 |
| 7288364 | Top anti-reflective coating composition and method for pattern formation of semiconductor device using the same | Jae Chang Jung, Sam Young Kim, Chang Moon Lim, Seung Chan Moon | 2007-10-30 |
| 7238653 | Cleaning solution for photoresist and method for forming pattern using the same | Geun Su Lee, Young Sun Hwang, Sung Koo Lee, Seung Chan Moon, Ki Soo Shin | 2007-07-03 |
| 7220679 | Method for forming patterns in a semiconductor device | Sung Koo Lee, Jae Chang Jung, Young Sun Hwang, Ki Soo Shin | 2007-05-22 |
| 7205089 | Cross-linking polymer for organic anti-reflective coating, organic anti-reflective coating composition comprising the same and method for forming photoresist pattern using the same | Jae Chang Jung, Seung Chan Moon, Ki Soo Shin | 2007-04-17 |
| 7198887 | Organic anti-reflective coating polymer, its preparation method and organic anti-reflective coating composition comprising the same | Geun-soo Lee, Seung Chan Moon, Ki Soo Shin, Won-Wook Lee | 2007-04-03 |
| 7112840 | Semiconductor memory device and method for fabricating the same | Seo Min Kim | 2006-09-26 |
| 7022458 | Photoresist polymer and photoresist composition containing the same | Geun Su Lee, Seung Chan Moon, Ki Soo Shin, Jae-Hyun Kim, Jung Woo Kim +2 more | 2006-04-04 |
| 7012002 | Semiconductor memory device and method for fabricating the same | Seo Min Kim | 2006-03-14 |