Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6162708 | Method for producing an epitaxial silicon single crystal wafer and the epitaxial silicon single crystal wafer | Ken Aihara, Tomosuke Yoshida | 2000-12-19 |
| 6139625 | Method for producing a silicon single crystal wafer and a silicon single crystal wafer | Norihiro Kobayashi, Satoshi Oka | 2000-10-31 |
| 6077343 | Silicon single crystal wafer having few defects wherein nitrogen is doped and a method for producing it | Makoto Iida, Masanori Kimura, Shozo Muraoka | 2000-06-20 |
| 5444246 | Determining carbon concentration in silicon single crystal by FT-IR | Yutaka Kitagawara, Hiroshi Kubota | 1995-08-22 |
| 5386118 | Method and apparatus for determination of interstitial oxygen concentration in silicon single crystal | Yutaka Kitagawara, Hiroshi Kubota, Takao Takenaka, Kazuhisa Takamizawa | 1995-01-31 |