Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6364947 | Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same | Makoto Iida, Eiichi Iino, Masanori Kimura, Hideki Yamanaka | 2002-04-02 |
| 6348180 | Silicon single crystal wafer having few crystal defects | Makoto Iida, Satoshi Suzuki, Eiichi Iino, Masanori Kimura | 2002-02-19 |
| 6334896 | Single-crystal silicon wafer having few crystal defects and method for manufacturing the same | Makoto Iida, Masanori Kimura | 2002-01-01 |
| 6261361 | Silicon single crystal wafer having few defects wherein nitrogen is doped and a method for producing it | Makoto Iida, Masaro Tamatsuka, Masanori Kimura | 2001-07-17 |
| 6197109 | Method for producing low defect silicon single crystal doped with nitrogen | Makoto Iida, Masaro Tamatsuka, Wataru Kusaki, Masanori Kimura | 2001-03-06 |
| 6159438 | Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same | Makoto Iida, Eiichi Iino, Masanori Kimura, Hideki Yamanaka | 2000-12-12 |
| 6120598 | Method for producing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers produced by the method | Makoto Iida, Eiichi Iino, Masanori Kimura | 2000-09-19 |
| 6120599 | Silicon single crystal wafer having few crystal defects, and method for producing the same | Makoto Iida, Eiichi Iino, Masanori Kimura | 2000-09-19 |
| 6077343 | Silicon single crystal wafer having few defects wherein nitrogen is doped and a method for producing it | Makoto Iida, Masaro Tamatsuka, Masanori Kimura | 2000-06-20 |
| 6066306 | Silicon single crystal wafer having few crystal defects, and method RFO producing the same | Makoto Iida, Eiichi Iino, Masanori Kimura | 2000-05-23 |
| 6053975 | Crystal holding apparatus | Makoto Iida, Eiichi Iino, Masanori Kimura | 2000-04-25 |
| 6048395 | Method for producing a silicon single crystal having few crystal defects | Makoto Iida, Satoshi Suzuki, Eiichi Iino, Masanori Kimura | 2000-04-11 |
| 6027562 | Method for producing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers produced by the method | Makoto Iida, Eiichi Iino, Masanori Kimura | 2000-02-22 |
| 5976246 | Process for producing silicon single crystal | Eiichi Iino, Masanori Kimura | 1999-11-02 |
| 5968264 | Method and apparatus for manufacturing a silicon single crystal having few crystal defects, and a silicon single crystal and silicon wafers manufactured by the same | Makoto Iida, Eiichi Iino, Masanori Kimura, Hideki Yamanaka | 1999-10-19 |
| 5968266 | Apparatus for manufacturing single crystal of silicon | Eiichi Iino, Masanori Kimura | 1999-10-19 |
| 5964941 | Crystal pulling method and apparatus | Eiichi Iino, Makoto Iida, Masanori Kimura | 1999-10-12 |
| 5948164 | Seed crystal holder | Makoto Iida, Eiichi Iino, Masanori Kimura | 1999-09-07 |
| 5911821 | Method of holding a monocrystal, and method of growing the same | Eiichi Iino, Makoto Iida, Masanori Kimura | 1999-06-15 |
| 5882397 | Crystal pulling method | Eiichi Iino, Makoto Iida, Masahiko Urano, Masanori Kimura | 1999-03-16 |
| 5871578 | Methods for holding and pulling single crystal | Eiichi Iino, Makoto Iida, Masanori Kimura | 1999-02-16 |