Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5880169 | Sulfonium salts and chemically amplified positive resist compositions | Satoshi Watanabe, Katsuya Takemura, Shigehiro Nagura, Akinobu Tanaka, Yoshio Kawai | 1999-03-09 |
| 5824824 | Sulfonium salts and chemically amplified positive resist compositions | Satoshi Watanabe, Kaysuya Takemura, Shigehiro Nagura, Akinobu Tanaka, Yoshio Kawai | 1998-10-20 |
| 5705702 | Method for preparing triarylsulfonium salts | Satoshi Watanabe, Junji Shimada, Toshinobu Ishihara | 1998-01-06 |