Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5824824 | Sulfonium salts and chemically amplified positive resist compositions | Yoichi Osawa, Satoshi Watanabe, Shigehiro Nagura, Akinobu Tanaka, Yoshio Kawai | 1998-10-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5824824 | Sulfonium salts and chemically amplified positive resist compositions | Yoichi Osawa, Satoshi Watanabe, Shigehiro Nagura, Akinobu Tanaka, Yoshio Kawai | 1998-10-20 |