Issued Patents All Time
Showing 76–100 of 136 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8030118 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Makoto Kawai, Koichi Tanaka, Yuuji Tobisaka, Yoshihiro Kubota | 2011-10-04 |
| 8021910 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Makoto Kawai, Koichi Tanaka, Yuuji Tobisaka, Yoshihiro Kubota | 2011-09-20 |
| 7993818 | Optical disk manufacturing method | Hidetoshi Watanabe | 2011-08-09 |
| 7977209 | Method for manufacturing SOI substrate | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2011-07-12 |
| 7972937 | Method for producing semiconductor substrate | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2011-07-05 |
| 7951513 | Pellicle and method for producing pellicle | Yoshihiro Kubota, Toshihiko Shindo | 2011-05-31 |
| 7935611 | Method for manufacturing substrate for photoelectric conversion element | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2011-05-03 |
| 7919217 | Pellicle and method for producing pellicle | Yoshihiro Kubota, Toshihiko Shindo | 2011-04-05 |
| 7901846 | Pellicle and method for manufacturing the same | Yoshihiro Kubota, Toshihiko Shindoo | 2011-03-08 |
| 7895749 | Method of manufacturing heat exchanger | Yoshihisa Eto, Naoto Takayanagi, Muneo Sakurada | 2011-03-01 |
| 7892934 | SOI substrate and method for manufacturing SOI substrate | Makoto Kawai, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Yuuji Tobisaka | 2011-02-22 |
| 7879175 | Method for manufacturing pyrolytic boron nitride composite substrate | Makoto Kawai, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Yuuji Tobisaka | 2011-02-01 |
| 7855127 | Method for manufacturing semiconductor substrate | Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka | 2010-12-21 |
| 7833878 | Method for manufacturing SOI substrate | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2010-11-16 |
| 7812423 | Optical device comprising crystalline semiconductor layer and reflective element | Felix Grawert, Kazumi Wada, Franz X. Kaertner | 2010-10-12 |
| 7799589 | Optical waveguide apparatus and method for manufacturing the same | Yoshihiro Kuboto, Atsuo Ito, Koichi Tanaka, Yuuji Tobisaka, Makoto Kawai | 2010-09-21 |
| 7790571 | SOQ substrate and method of manufacturing SOQ substrate | Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka | 2010-09-07 |
| 7749870 | Method for producing SOI substrate | Makoto Kawai, Yoshihiro Kubota, Atsuo Ito, Kouichi Tanaka, Yuji Tobisaka +1 more | 2010-07-06 |
| 7732867 | Method for manufacturing SOQ substrate | Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka | 2010-06-08 |
| 7696059 | Method for manufacturing semiconductor substrate | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2010-04-13 |
| 7691724 | Method for manufacturing SOI substrate | Makoto Kawai, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Yuuji Tobisaka | 2010-04-06 |
| 7615456 | Method for manufacturing SOI substrate | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Yuuji Tobisaka, Koichi Tanaka | 2009-11-10 |
| 7321713 | Silicon based on-chip photonic band gap cladding waveguide | Xiaoman Duan, Lionel C. Kimerling, Yasha Yi | 2008-01-22 |
| 7310454 | Photonic bandgap modulator, amplifier, demux, and TDM devices | Lionel C. Kimerling, Kazumi Wada | 2007-12-18 |
| 7251402 | Anti-reflection coating for the pass-band of photonic bandgap crystal | Ivan Celanovic, Natalija Jovanovic, Francis O'Sullivan, Kazumi Wada | 2007-07-31 |