Issued Patents All Time
Showing 26–50 of 136 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629440 | Method for manufacturing composite wafer provided with oxide single crystal thin film | — | 2020-04-21 |
| 10612157 | Method for manufacturing SiC composite substrate, and method for manufacturing semiconductor substrate | Yoshihiro Kubota, Hiroyuki Nagasawa | 2020-04-07 |
| 10553518 | Heat dissipation substrate and method for producing same | Yoshihiro Kubota, Makoto Kawai | 2020-02-04 |
| D869308 | Micro flow channel chip | Yuji Akiyama, Gakuji Hashimoto, Hiroto Kasai, Masaya Kakuta, Takeshi Yamasaki +2 more | 2019-12-10 |
| 10431460 | Method for producing SiC composite substrate | Yoshihiro Kubota, Hiroyuki Nagasawa | 2019-10-01 |
| 10414118 | Microchip manufactured with thermocompression | Tomomi Yukumoto, Takeshi Yamasaki, Yuji Akiyama | 2019-09-17 |
| 10315194 | Chip device and a particle analyzing apparatus | Yuji Akiyama, Takeshi Yamasaki | 2019-06-11 |
| 10103021 | Thermally oxidized heterogeneous composite substrate and method for manufacturing same | Yuji Tobisaka, Kazutoshi Nagata | 2018-10-16 |
| 10006849 | Particle analyzer | Tatsumi Ito | 2018-06-26 |
| D795724 | Micro flow channel chip for a flow cytometer | Yuji Akiyama, Gakuji Hashimoto, Hiroto Kasai, Masaya Kakuta, Takeshi Yamasaki +2 more | 2017-08-29 |
| 9741603 | Method for producing hybrid substrate, and hybrid substrate | Yuji Tobisaka, Yoshihiro Kubota, Makoto Kawai, Kazutoshi Nagata | 2017-08-22 |
| 9646873 | Method for producing SOS substrates, and SOS substrate | Shigeru Konishi, Yoshihiro Kubota, Makoto Kawai, Kazutoshi Nagata | 2017-05-09 |
| 9610750 | Composite structure and manufacturing method therefor | Tomomi Yukumoto, Takeshi Yamasaki, Yuji Akiyama | 2017-04-04 |
| 9459182 | Microchip and particle analyzing apparatus | Yuji Akiyama, Takeshi Yamasaki | 2016-10-04 |
| 9405184 | Pellicle for EUV, and an assembly including the pellicle, and a method for assembling the same | Motoyuki Yamada | 2016-08-02 |
| D757580 | Micro flow channel chip for flow cytometer | Yuji Akiyama, Gakuji Hashimoto, Hiroto Kasai, Masaya Kakuta, Takeshi Yamasaki +2 more | 2016-05-31 |
| 9312166 | Method for manufacturing composite wafers | Kazutoshi Nagata | 2016-04-12 |
| 9214380 | SOS substrate having low surface defect density | Atsuo Ito, Yuji Tobisaka, Makoto Kawai | 2015-12-15 |
| 9214379 | SOS substrate having low defect density in vicinity of interface | Atsuo Ito, Yuji Tobisaka, Makoto Kawai | 2015-12-15 |
| 9195130 | Pellicle for EUV | Motoyuki Yamada | 2015-11-24 |
| 9176042 | Microchip and particulate analyzing device | Tatsumi Ito, Masaya Kakuta, Takeshi Yamasaki | 2015-11-03 |
| 9064929 | Method for reducing the thickness of an SOI layer | Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka | 2015-06-23 |
| 8975159 | Method for manufacturing bonded wafer | — | 2015-03-10 |
| 8937721 | Sensing device | Makoto Fujimaki, Kazutoshi Nagata | 2015-01-20 |
| 8772132 | Method of manufacturing laminated wafer by high temperature laminating method | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Kouichi Tanaka, Yuji Tobisaka +1 more | 2014-07-08 |