Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103021 | Thermally oxidized heterogeneous composite substrate and method for manufacturing same | Shoji Akiyama, Kazutoshi Nagata | 2018-10-16 |
| 9741603 | Method for producing hybrid substrate, and hybrid substrate | Shoji Akiyama, Yoshihiro Kubota, Makoto Kawai, Kazutoshi Nagata | 2017-08-22 |
| 9214380 | SOS substrate having low surface defect density | Shoji Akiyama, Atsuo Ito, Makoto Kawai | 2015-12-15 |
| 9214379 | SOS substrate having low defect density in vicinity of interface | Shoji Akiyama, Atsuo Ito, Makoto Kawai | 2015-12-15 |
| 8772132 | Method of manufacturing laminated wafer by high temperature laminating method | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Kouichi Tanaka +1 more | 2014-07-08 |
| 8551862 | Method of manufacturing laminated wafer by high temperature laminating method | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Kouichi Tanaka +1 more | 2013-10-08 |
| 8497188 | Method for producing bonded wafer | Makoto Kawai, Shoji Akiyama | 2013-07-30 |
| 8420503 | Method for producing SOI substrate | Shoji Akiyama, Makoto Kawai, Atsuo Ito, Yoshihiro Kubota, Kouichi Tanaka +1 more | 2013-04-16 |
| 8357586 | Method for manufacturing SOI wafer | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Kouichi Tanaka, Makoto Kawai +1 more | 2013-01-22 |
| 8314006 | Method for manufacturing bonded wafer | Yoshihiro Kubota, Atsuo Ito, Kouichi Tanaka, Makoto Kawai, Shoji Akiyama +1 more | 2012-11-20 |
| 8138064 | Method for producing silicon film-transferred insulator wafer | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Kouichi Tanaka +1 more | 2012-03-20 |
| 8030176 | Method for preparing substrate having monocrystalline film | Yoshihiro Kubota, Makoto Kawai, Kouichi Tanaka, Shoji Akiyama, Yoshihiro Nojima | 2011-10-04 |
| 7749870 | Method for producing SOI substrate | Makoto Kawai, Yoshihiro Kubota, Atsuo Ito, Kouichi Tanaka, Shoji Akiyama +1 more | 2010-07-06 |