Issued Patents All Time
Showing 51–75 of 136 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8765576 | Process for producing laminated substrate and laminated substrate | Atsuo Ito, Yoshihiro Kubota, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka | 2014-07-01 |
| 8748294 | SOS substrate with reduced stress | — | 2014-06-10 |
| D704580 | Micro flow channel chip for flow cytometer | Yuji Akiyama, Takeshi Yamasaki | 2014-05-13 |
| 8716106 | Method for producing a bonded substrate | — | 2014-05-06 |
| 8657121 | Microparticle sorting apparatus, microchip and microchip module | Masataka Shinoda, Takeshi Matsui, Akiko Tsuji, Takeshi Yamasaki | 2014-02-25 |
| 8563401 | Method for fabricating SOI substrate | Atsuo Ito | 2013-10-22 |
| 8551862 | Method of manufacturing laminated wafer by high temperature laminating method | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Kouichi Tanaka, Yuji Tobisaka +1 more | 2013-10-08 |
| 8546245 | Method for manufacturing composite substrate comprising wide bandgap semiconductor layer | — | 2013-10-01 |
| 8518612 | Pellicle for lithography and manufacturing method thereof | Yoshihiro Kubota | 2013-08-27 |
| 8497188 | Method for producing bonded wafer | Makoto Kawai, Yuji Tobisaka | 2013-07-30 |
| 8420503 | Method for producing SOI substrate | Makoto Kawai, Atsuo Ito, Yoshihiro Kubota, Kouichi Tanaka, Yuji Tobisaka +1 more | 2013-04-16 |
| 8357586 | Method for manufacturing SOI wafer | Yoshihiro Kubota, Atsuo Ito, Kouichi Tanaka, Makoto Kawai, Yuji Tobisaka +1 more | 2013-01-22 |
| D673287 | Micro flow channel chip | Masaya Kakuta, Takeshi Yamasaki, Tatsumi Ito, Masataka Shinoda | 2012-12-25 |
| 8314006 | Method for manufacturing bonded wafer | Yuji Tobisaka, Yoshihiro Kubota, Atsuo Ito, Kouichi Tanaka, Makoto Kawai +1 more | 2012-11-20 |
| 8288251 | Method for preparing SOI substrate having backside sandblasted | — | 2012-10-16 |
| 8268700 | Method for manufacturing SOI wafer | Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka | 2012-09-18 |
| 8263478 | Method for manufacturing semiconductor substrate | Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai, Yuuji Tobisaka | 2012-09-11 |
| 8227290 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Masahiro Furuya, Makoto Kawai, Koichi Tanaka, Yoshihiro Kubota +1 more | 2012-07-24 |
| 8227289 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Makoto Kawai, Koichi Tanaka, Yuuji Tobisaka, Yoshihiro Kubota | 2012-07-24 |
| 8138064 | Method for producing silicon film-transferred insulator wafer | Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Kouichi Tanaka, Yuji Tobisaka +1 more | 2012-03-20 |
| 8129612 | Method for manufacturing single-crystal silicon solar cell and single-crystal silicon solar cell | Atsuo Ito, Makoto Kawai, Koichi Tanaka, Yuuji Tobisaka, Yoshihiro Kubota | 2012-03-06 |
| 8119903 | Method of manufacturing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Makoto Kawai, Koichi Tanaka, Yuuji Tobisaka, Yoshihiro Kubota | 2012-02-21 |
| 8106290 | Method for manufacturing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Makoto Kawai, Kouichi Tanaka, Yuuji Tobisaka, Yoshihiro Kubota | 2012-01-31 |
| 8088670 | Method for manufacturing bonded substrate with sandblast treatment | Yoshihiro Kubota, Atsuo Ito, Kouichi Tanaka, Makoto Kawai, Yuuji Tobisaka | 2012-01-03 |
| 8030176 | Method for preparing substrate having monocrystalline film | Yoshihiro Kubota, Makoto Kawai, Kouichi Tanaka, Yuji Tobisaka, Yoshihiro Nojima | 2011-10-04 |