Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9064929 | Method for reducing the thickness of an SOI layer | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai | 2015-06-23 |
| 8765576 | Process for producing laminated substrate and laminated substrate | Shoji Akiyama, Atsuo Ito, Yoshihiro Kubota, Koichi Tanaka, Makoto Kawai | 2014-07-01 |
| 8268700 | Method for manufacturing SOI wafer | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai | 2012-09-18 |
| 8263478 | Method for manufacturing semiconductor substrate | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai | 2012-09-11 |
| 8227289 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Makoto Kawai, Koichi Tanaka, Yoshihiro Kubota | 2012-07-24 |
| 8227290 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Masahiro Furuya, Makoto Kawai, Koichi Tanaka +1 more | 2012-07-24 |
| 8129612 | Method for manufacturing single-crystal silicon solar cell and single-crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Makoto Kawai, Koichi Tanaka, Yoshihiro Kubota | 2012-03-06 |
| 8119903 | Method of manufacturing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Makoto Kawai, Koichi Tanaka, Yoshihiro Kubota | 2012-02-21 |
| 8106290 | Method for manufacturing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Makoto Kawai, Kouichi Tanaka, Yoshihiro Kubota | 2012-01-31 |
| 8088670 | Method for manufacturing bonded substrate with sandblast treatment | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Kouichi Tanaka, Makoto Kawai | 2012-01-03 |
| 8030118 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Makoto Kawai, Koichi Tanaka, Yoshihiro Kubota | 2011-10-04 |
| 8021910 | Method for producing single crystal silicon solar cell and single crystal silicon solar cell | Atsuo Ito, Shoji Akiyama, Makoto Kawai, Koichi Tanaka, Yoshihiro Kubota | 2011-09-20 |
| 7977209 | Method for manufacturing SOI substrate | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Koichi Tanaka | 2011-07-12 |
| 7972937 | Method for producing semiconductor substrate | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Koichi Tanaka | 2011-07-05 |
| 7935611 | Method for manufacturing substrate for photoelectric conversion element | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Koichi Tanaka | 2011-05-03 |
| 7892934 | SOI substrate and method for manufacturing SOI substrate | Makoto Kawai, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Shoji Akiyama | 2011-02-22 |
| 7879175 | Method for manufacturing pyrolytic boron nitride composite substrate | Makoto Kawai, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Shoji Akiyama | 2011-02-01 |
| 7855127 | Method for manufacturing semiconductor substrate | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai | 2010-12-21 |
| 7833878 | Method for manufacturing SOI substrate | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Koichi Tanaka | 2010-11-16 |
| 7823418 | Method of making glass base material | Tadakatsu Shimada, Kazuhisa Hatayama, Hideo Hirasawa | 2010-11-02 |
| 7799589 | Optical waveguide apparatus and method for manufacturing the same | Shoji Akiyama, Yoshihiro Kuboto, Atsuo Ito, Koichi Tanaka, Makoto Kawai | 2010-09-21 |
| 7790571 | SOQ substrate and method of manufacturing SOQ substrate | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai | 2010-09-07 |
| 7732867 | Method for manufacturing SOQ substrate | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Makoto Kawai | 2010-06-08 |
| 7696059 | Method for manufacturing semiconductor substrate | Shoji Akiyama, Yoshihiro Kubota, Atsuo Ito, Makoto Kawai, Koichi Tanaka | 2010-04-13 |
| 7691724 | Method for manufacturing SOI substrate | Makoto Kawai, Yoshihiro Kubota, Atsuo Ito, Koichi Tanaka, Shoji Akiyama | 2010-04-06 |