Issued Patents All Time
Showing 26–50 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828218 | Method of forming a thin film using atomic layer deposition | Yeong-kwan Kim, Seung Hwan Lee | 2004-12-07 |
| 6828616 | Integrated circuit devices that utilize doped Poly-Si1−xGex conductive plugs as interconnects | Sang-jeong Oh, Yeong-kwan Kim, Seung Hwan Lee, Dong Chan Kim | 2004-12-07 |
| 6806183 | Methods for forming capacitors on semiconductor substrates | Chang-Seok Kang, Doo-sup Hwang, Cha-young Yoo, Hong-Bae Park | 2004-10-19 |
| 6800570 | Method of forming a metal oxide film | Han-Mei Choi, Sung Tae Kim, Young Sun Kim, Ki-Chul Kim, In Sung Park | 2004-10-05 |
| 6794263 | Method of manufacturing a semiconductor device including alignment mark | Kong-Soo Lee, Jae-Jong Han, Gi Hyun Hwang, Kyoung-Seok Kim, Sung-Eui Kim +1 more | 2004-09-21 |
| 6720275 | Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure | Ki-Yeon Park, Heung-Soo Park | 2004-04-13 |
| 6700153 | One-cylinder stack capacitor and method for fabricating the same | Jung-Hwan Oh, Ki-Hyun Hwang, Jae Young Park, In-Seak Hwang | 2004-03-02 |
| 6693032 | Method of forming a contact structure having an anchoring portion | Bong-young Yoo, Dae-hong Ko, Nae-In Lee | 2004-02-17 |
| 6680511 | Integrated circuit devices providing improved short prevention | Hyoung Joon Kim, Byeong-yun Nam | 2004-01-20 |
| 6680251 | Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters | Seok-Jun Won, Cha-young Yoo, Sung Tae Kim, Yun-Jung Lee, Soon-yeon Park | 2004-01-20 |
| 6653155 | Integrated circuit devices including a resistor pattern and methods for manufacturing the same | Seok-Jun Won | 2003-11-25 |
| 6624069 | Methods of forming integrated circuit capacitors having doped HSG electrodes | Seung Hwan Lee, Sang-Hyeop Lee, Young Sun Kim, Se-Jin Shim, You-Chan Jin +7 more | 2003-09-23 |
| 6576053 | Method of forming thin film using atomic layer deposition method | Yeong-kwan Kim, Jae-Soon Lim, Sung-Je Choi, Sang In Lee | 2003-06-10 |
| 6555394 | Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure | Ki-Yeon Park, Heung-Soo Park | 2003-04-29 |
| 6476489 | Apparatus and manufacturing method for semiconductor device adopting NA interlayer contact structure | Bong-young Yoo, Dae-hong Ko, Nae-In Lee | 2002-11-05 |
| 6468924 | Methods of forming thin films by atomic layer deposition | Seung Hwan Lee, Yeong-kwan Kim, Dong Chan Kim | 2002-10-22 |
| 6426308 | Methods for forming films having high dielectric constants | Moon-Yong Lee, Kyung-hun Kim, In Sung Park | 2002-07-30 |
| 6416584 | Apparatus for forming a film on a substrate | Seok-Jun Won, Yong-Woo Hyung | 2002-07-09 |
| 6412797 | Front wheel suspension system for a vehicle | — | 2002-07-02 |
| 6403495 | Capacitor fabricating method of semiconductor device | Young Sun Kim | 2002-06-11 |
| 6391803 | Method of forming silicon containing thin films by atomic layer deposition utilizing trisdimethylaminosilane | Yeong-kwan Kim, Seung Hwan Lee | 2002-05-21 |
| 6221742 | Method for fabricating polysilicon film for semiconductor device | Cha-young Yoo, Young Sun Kim, Seung Hee Nam | 2001-04-24 |
| 6218260 | Methods of forming integrated circuit capacitors having improved electrode and dielectric layer characteristics and capacitors formed thereby | Seung Hwan Lee, Sang-Hyeop Lee, Young Sun Kim, Se-Jin Shim, You-Chan Jin +7 more | 2001-04-17 |
| 6207489 | Method for manufacturing capacitor of semiconductor memory device having tantalum oxide film | Kab-jin Nam, Seok-Jun Won, Ki-Yeon Park, Yong-Woo Hyung | 2001-03-27 |
| 6194263 | Methods for forming capacitor structures including etching pits | Young Sun Kim | 2001-02-27 |