Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7429406 | Method of forming thin ruthenium-containing layer | Cha-young Yoo, Seok-Jun Won | 2008-09-30 |
| 6692795 | Method for fabricating semiconductor device having ruthenium layer and equipment for fabricating the same | Seok-Jun Won, Cha-young Yoo | 2004-02-17 |
| 6680251 | Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters | Seok-Jun Won, Cha-young Yoo, Sung Tae Kim, Young-Wook Park, Yun-Jung Lee | 2004-01-20 |
| 6677217 | Methods for manufacturing integrated circuit metal-insulator-metal capacitors including hemispherical grain lumps | Jae Hyun Joo, Wan-don Kim, Seok-Jun Won | 2004-01-13 |
| 6649502 | Methods of forming multilayer dielectric regions using varied deposition parameters | Cha-young Yoo, Han-Jin Lim, Wan-don Kim, Se-Jin Lee, Yong-Kuk Jeong +3 more | 2003-11-18 |
| 6472319 | Method for manufacturing capacitor of semiconductor memory device by two-step thermal treatment | Seok-Jun Won, Yun-Jung Lee, Cha-young Yoo, Doo-sup Hwang, Eun-Ae Chung +1 more | 2002-10-29 |