| 9564435 |
Semiconductor device including FinFETs having different gate structures and method of manufacturing the semiconductor device |
Jung-Dal Choi, Toshiro Nakanishi, Yu Bin Kim, Gab-Jin Nam, Dong-Kyu Lee +1 more |
2017-02-07 |
| 9443735 |
Method of manufacturing semiconductor device |
Jin Soak Kim, Gab-Jin Nam, Dong Hwan Kim, Su Hwan Kim, Toshiro Nakanishi +2 more |
2016-09-13 |
| 9368589 |
Semiconductor device and semiconductor module |
Sung-Kweon Baek, Gab-Jin Nam, Jin Soak Kim, Ji Young Min |
2016-06-14 |
| 8119486 |
Methods of manufacturing semiconductor devices having a recessed-channel |
Young-Pil Kim, Gab-Jin Nam, Hee-don Hwang, Ji Young Min |
2012-02-21 |
| 8110473 |
Semiconductor device comprising multilayer dielectric film and related method |
Sang-Yeol Kang, Jong-Cheol Lee, Ki-vin Lim, Hoon Choi |
2012-02-07 |
| 7939872 |
Multi-dielectric films for semiconductor devices and methods of fabricating multi-dielectric films |
Jong-Cheol Lee, Sang-Yeol Kang, Ki-vin Lim, Hoon Choi |
2011-05-10 |
| 7838438 |
Dielectric layer, method of manufacturing the dielectric layer and method of manufacturing capacitor using the same |
Ki-Vin Im, Jae-Hyun Yeo, Kyoung-Ryul Yoon, Jong-Cheol Lee, Young Sun Kim |
2010-11-23 |
| 7824501 |
In-situ method of cleaning vaporizer during dielectric layer deposition process |
Hoon Choi, Jong-Cheol Lee, Ki-Vin Im, Sang-Yeol Kang, Young Sun Kim +1 more |
2010-11-02 |
| 7791125 |
Semiconductor devices having dielectric layers and methods of forming the same |
Hoon Choi, Jong-Cheol Lee, Ki-Vin Im, Jae-Hyun Yeo, Sang-Yeol Kang |
2010-09-07 |
| 7759718 |
Method manufacturing capacitor dielectric |
Sang-Yeol Kang, Jong-Cheol Lee, Ki-Vin Im, Jae-Hyun Yeo, Hoon Choi |
2010-07-20 |
| 7750385 |
Semiconductor interconnection structures and capacitors including poly-SiGe layers and metal contact plugs |
Ki-Sun Kim, Young Sun Kim, Jin-Tae Noh |
2010-07-06 |
| 7655519 |
Methods of fabricating metal-insulator-metal capacitors with a chemical barrier layer in a lower electrode |
Jae-Hyoung Choi, Jung-hee Chung, Young Sun Kim, Cha-young Yoo |
2010-02-02 |
| 7514315 |
Methods of forming capacitor structures having aluminum oxide diffusion barriers |
Jong-Cheol Lee, Kyoung-Ryul Yoon, Ki-Vin Im, Jae-Hyun Yeo, Jin-Il Lee |
2009-04-07 |
| 7485585 |
Method of forming a thin film, method of manufacturing a gate structure using the same and method of manufacturing a capacitor using the same |
Young-Geun Park, Jae-Hyun Yeo, Ki-Vin Im, Young Sun Kim, Sung Tae Kim +1 more |
2009-02-03 |
| 7312130 |
Methods of forming capacitor structures including L-shaped cavities |
Dong Chan Kim, Chang-Jin Kang, Byeong-yun Nam, Kyeong-Koo Ghi, Sung-Il Cho |
2007-12-25 |
| 7176533 |
Semiconductor devices having contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus |
Myoung-Bum Lee, Young-Pil Kim, Jin-Gyun Kim, Bean-Jun Jin |
2007-02-13 |
| 7153750 |
Methods of forming capacitors of semiconductor devices including silicon-germanium and metallic electrodes |
Ki-Hyun Hwang, Jung-Hwan Oh, Hyo Jung Kim, Seok-Woo Nam, Won-sik Shin +4 more |
2006-12-26 |
| 6953741 |
Methods of fabricating contacts for semiconductor devices utilizing a pre-flow process |
Myoung-Bum Lee, Beom-jun Jim |
2005-10-11 |
| 6927166 |
Method for manufacturing semiconductor devices and integrated circuit capacitors whereby degradation of surface morphology of a metal layer from thermal oxidation is suppressed |
Doo-sup Hwang, Cha-young Yoo |
2005-08-09 |
| 6858529 |
Methods of forming contact plugs including polysilicon doped with an impurity having a lesser diffusion coefficient than phosphorus |
Myoung-Bum Lee, Young-Pil Kim, Jin-Gyun Kim, Bean-Jun Jin |
2005-02-22 |
| 6815221 |
Method for manufacturing capacitor of semiconductor memory device controlling thermal budget |
Wan-don Kim, Cha-young Yoo, Doo-sup Hwang, Jae Hyun Joo, Yong-Kuk Jeong |
2004-11-09 |
| 6683001 |
Method for manufacturing a semiconductor device whereby degradation of surface morphology of a metal layer from thermal oxidation is suppressed |
Doo-sup Hwang, Cha-young Yoo |
2004-01-27 |
| 6472319 |
Method for manufacturing capacitor of semiconductor memory device by two-step thermal treatment |
Seok-Jun Won, Yun-Jung Lee, Soon-yeon Park, Cha-young Yoo, Doo-sup Hwang +1 more |
2002-10-29 |
