Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7547952 | Method for hafnium nitride deposition | Craig Metzner, Shreyas Kher, M. Noel Rocklein, Steven M. George | 2009-06-16 |
| 7544607 | Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same | Dong Chan Kim, Seung Hwan Lee, Young-Wook Park | 2009-06-09 |
| 7316954 | Methods of fabricating integrated circuit devices that utilize doped poly-Si1−xGex conductive plugs as interconnects | Sang-jeong Oh, Seung Hwan Lee, Dong Chan Kim, Young-Wook Park | 2008-01-08 |
| 7052918 | Multi-layer film for thin film structure, capacitor using the same and fabrication method thereof | Jae-Soon Lim, Heung-Soo Park, Sang In Lee | 2006-05-30 |
| 6833310 | Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same | Dong Chan Kim, Seung Hwan Lee, Young-Wook Park | 2004-12-21 |
| 6828218 | Method of forming a thin film using atomic layer deposition | Young-Wook Park, Seung Hwan Lee | 2004-12-07 |
| 6828616 | Integrated circuit devices that utilize doped Poly-Si1−xGex conductive plugs as interconnects | Sang-jeong Oh, Seung Hwan Lee, Dong Chan Kim, Young-Wook Park | 2004-12-07 |
| 6576053 | Method of forming thin film using atomic layer deposition method | Young-Wook Park, Jae-Soon Lim, Sung-Je Choi, Sang In Lee | 2003-06-10 |
| 6570253 | Multi-layer film for a thin film structure and a capacitor using the same | Jae-Soon Lim, Heung-Soo Park, Sang In Lee | 2003-05-27 |
| 6509601 | Semiconductor memory device having capacitor protection layer and method for manufacturing the same | Yong-Tak Lee, Hag-Ju Cho | 2003-01-21 |
| 6489214 | Method for forming a capacitor of a semiconductor device | In-seon Park, Sang Min Lee, Chang-Soo Park | 2002-12-03 |
| 6468924 | Methods of forming thin films by atomic layer deposition | Seung Hwan Lee, Dong Chan Kim, Young-Wook Park | 2002-10-22 |
| 6391803 | Method of forming silicon containing thin films by atomic layer deposition utilizing trisdimethylaminosilane | Young-Wook Park, Seung Hwan Lee | 2002-05-21 |
| 6335240 | Capacitor for a semiconductor device and method for forming the same | In-seon Park, Sang Min Lee, Chang-Soo Park | 2002-01-01 |
| 6270572 | Method for manufacturing thin film using atomic layer deposition | Sang In Lee, Chang-Soo Park, Sang Min Lee | 2001-08-07 |
| 6207487 | Method for forming dielectric film of capacitor having different thicknesses partly | Sang In Lee, Chang-Soo Park, Young Sun Kim | 2001-03-27 |
| 6162501 | Method for manufacturing thin films of multi-element group oxide or nitride | — | 2000-12-19 |
| 6144060 | Integrated circuit devices having buffer layers therein which contain metal oxide stabilized by heat treatment under low temperature | In-seon Park, Sang In Lee, Byung-Hee Kim, Sang Min Lee, Chang-Soo Park | 2000-11-07 |