Issued Patents All Time
Showing 76–86 of 86 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649502 | Methods of forming multilayer dielectric regions using varied deposition parameters | Cha-young Yoo, Han-Jin Lim, Wan-don Kim, Se-Jin Lee, Soon-yeon Park +3 more | 2003-11-18 |
| 6624069 | Methods of forming integrated circuit capacitors having doped HSG electrodes | Seung Hwan Lee, Sang-Hyeop Lee, Young Sun Kim, Se-Jin Shim, You-Chan Jin +7 more | 2003-09-23 |
| 6613629 | Methods for manufacturing storage nodes of stacked capacitors | Wan-don Kim, Cha-young Yoo, Jae Hyun Joo | 2003-09-02 |
| 6580111 | Metal-insulator-metal capacitor | Wan-don Kim, Jin Won Kim, Cha-young Yoo | 2003-06-17 |
| 6537875 | Semiconductor memory device for reducing damage to interlevel dielectric layer and fabrication method thereof | Cha-young Yoo | 2003-03-25 |
| 6472319 | Method for manufacturing capacitor of semiconductor memory device by two-step thermal treatment | Yun-Jung Lee, Soon-yeon Park, Cha-young Yoo, Doo-sup Hwang, Eun-Ae Chung +1 more | 2002-10-29 |
| 6416584 | Apparatus for forming a film on a substrate | Young-Wook Park, Yong-Woo Hyung | 2002-07-09 |
| 6218260 | Methods of forming integrated circuit capacitors having improved electrode and dielectric layer characteristics and capacitors formed thereby | Seung Hwan Lee, Sang-Hyeop Lee, Young Sun Kim, Se-Jin Shim, You-Chan Jin +7 more | 2001-04-17 |
| 6207489 | Method for manufacturing capacitor of semiconductor memory device having tantalum oxide film | Kab-jin Nam, Ki-Yeon Park, Yong-Woo Hyung, Young-Wook Park | 2001-03-27 |
| 6136641 | Method for manufacturing capacitor of semiconductor device including thermal treatment to dielectric film under hydrogen atmosphere | Kab-jin Nam, Young-Wook Park | 2000-10-24 |
| 6133148 | Method of depositing film for semiconductor device in single wafer type apparatus using a lamp heating method | Kyoung-Hoon Kim, Young-Wook Park, Kab-jin Nam, Duk-soo Yoon, Sun-Woo Kwak | 2000-10-17 |