Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9266720 | Hybrid integrated component | Johannes Classen, Axel Franke, Jens Frey, Heribert Weber, Frank Fischer +2 more | 2016-02-23 |
| 9233841 | Production process for a micromechanical component and micromechanical component | Friedjof Heuck, Christoph Schelling, Benjamin Schmidt | 2016-01-12 |
| 9212048 | Hybridly integrated component and method for the production thereof | Johannes Classen, Heribert Weber, Daniel Christoph Meisel | 2015-12-15 |
| 9164123 | Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration | Reinhard Neul, Torsten Ohms, Daniel Christoph Meisel | 2015-10-20 |
| 9112108 | Energy source and method for supplying an autonomous electrical load system and the use of same | Rolf Scheben | 2015-08-18 |
| 8955380 | Rotation rate sensor | Benjamin Schmidt | 2015-02-17 |
| 8950258 | Micromechanical angular acceleration sensor and method for measuring an angular acceleration | Reinhard Neul, Torsten Ohms, Daniel Christoph Meisel | 2015-02-10 |
| 8901679 | Micromechanical structure, in particular sensor arrangement, and corresponding operating method | Johannes Classen, Lars Tebje, Daniel Christoph Meisel | 2014-12-02 |
| 8833135 | Sensor system and method for calibrating a sensor system | Axel Franke, Alexander Buhmann, Marian Keck | 2014-09-16 |
| 8836053 | Hybrid integrated component and method for the manufacture thereof | Heribert Weber, Frank Fischer, Yvonne Bergmann | 2014-09-16 |
| 8711459 | Micromechanical component, device for beam deflection of monochromatic light, and spectrometer | — | 2014-04-29 |
| 8695427 | Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure | Jochen Reinmuth, Ralf Boessendoerfer, Axel Franke | 2014-04-15 |
| 8461833 | Method for determining the sensitivity of an acceleration sensor or magnetic field sensor | Johannes Classen, Arnd Kaelberer, Hans-Joerg Faisst, Axel Franke, Holger Rank +4 more | 2013-06-11 |