Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982994 | Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head | Martin Schönleber, Matthias Kunkel | 2018-05-29 |
| 9677871 | Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head | Martin Schönleber, Matthias Kunkel | 2017-06-13 |
| 9500471 | Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object | Matthias Kunkel | 2016-11-22 |
| 9494409 | Test device for testing a bonding layer between wafer-shaped samples and test process for testing the bonding layer | Martin Schönleber | 2016-11-15 |
| 8716039 | Monitoring apparatus and method for in-situ measurement of wafer thicknesses for monitoring the thinning of semiconductor wafers and thinning apparatus comprising a wet etching apparatus and a monitoring apparatus | Claus Dusemund, Martin Schoenleber, Christoph Dietz | 2014-05-06 |