Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982994 | Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head | Martin Schönleber, Berthold Michelt | 2018-05-29 |
| 9677871 | Optical measuring method and measuring device having a measuring head for capturing a surface topography by calibrating the orientation of the measuring head | Martin Schönleber, Berthold Michelt | 2017-06-13 |
| 9500471 | Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object | Berthold Michelt | 2016-11-22 |