Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8716039 | Monitoring apparatus and method for in-situ measurement of wafer thicknesses for monitoring the thinning of semiconductor wafers and thinning apparatus comprising a wet etching apparatus and a monitoring apparatus | Martin Schoenleber, Berthold Michelt, Christoph Dietz | 2014-05-06 |
| 6939527 | Method for the purification of hydrogen peroxide solutions | Dietmar Oeter, Ewald Neumann, Klaus Freissler, Martin Hostalek | 2005-09-06 |
| 6679764 | Supply system for chemicals and its use | Ulrich Finkenzeller, Thomas Schwortschik | 2004-01-20 |
| 6623248 | System for conveying liquids without pulsing | Klaus Freissler, Wilfried Jammer, Michael Poth, Alberto Dix, Eberhard Tempel | 2003-09-23 |
| 6338743 | Buffer solutions for suspensions used in chemical-mechanical polishing | Rudolf Rhein, Manuela Schweikert, Martin Hostalek | 2002-01-15 |