Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7531492 | Composition for the removal of sidewall residues | Raimund Mellies, Marc Boerner, Lucia Arnold, Andrea Barko | 2009-05-12 |
| 7501072 | Etching solution comprising hydrofluoric acid | Claudia Wiegand, Eberhard Tempel | 2009-03-10 |
| 7417016 | Composition for the removing of sidewall residues | Raimund Mellies, Marc Boerner, Lucia Arnold, Andrea Barko | 2008-08-26 |
| 6338743 | Buffer solutions for suspensions used in chemical-mechanical polishing | Claus Dusemund, Manuela Schweikert, Martin Hostalek | 2002-01-15 |