Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9275851 | Aqueous, nitrogen-free cleaning composition and its use for removing residues and contaminants from semiconductor substrates suitable for manufacturing microelectronic devices | Andreas Klipp, Vijay Immanuel Raman, Shyam Sundar Venkataraman, Mingjie Zhong | 2016-03-01 |
| 8969275 | Aqueous alkaline cleaning compositions and methods of their use | Andreas Klipp | 2015-03-03 |
| 8927476 | Aqueous alkaline cleaning compositions and methods of their use | Andreas Klipp | 2015-01-06 |
| 8652972 | Stabilized etching solutions for CU and CU/NI layers | Martin Fluegge, Thomas Goelzenleuchter, Marianne Schwager, Ruediger Oesten | 2014-02-18 |
| 7919445 | Aqueous solution for removing post-etch residue | — | 2011-04-05 |
| 7531492 | Composition for the removal of sidewall residues | Marc Boerner, Lucia Arnold, Andrea Barko, Rudolf Rhein | 2009-05-12 |
| 7417016 | Composition for the removing of sidewall residues | Marc Boerner, Lucia Arnold, Andrea Barko, Rudolf Rhein | 2008-08-26 |