Method of forming low resistivity fluorine free tungsten film without nucleation

Assignee

• Lam Research

Inventors

• Hanna Bamnolker (23 patents)
• Joshua Collins (59 patents)
• Tomas Sadilek (2 patents)
• Hyeong Seop Shin (2 patents)
• Xiaolan Ba (11 patents)
• Raashina Humayun (70 patents)
• Michal Danek (93 patents)
• Lawrence Schloss (38 patents)

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