Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Lithographic apparatus and method

Lithographic apparatus and method

US Patent 9977348 · Granted May 22, 2018

Estimated economic value: $11,239,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Temperature conditioning system, a lithographic apparatus and a method of temper2025
Wavelength tracking system, method to calibrate a wavelength tracking system, li2025
Wavelength tracking system, method to calibrate a wavelength tracking system, li2025
Imprint apparatus with movable stages2024
Metrology apparatus2024
Lithographic apparatus2024
Lithographic apparatus2023
Lithographic apparatus2023
Interferometer system, method of determining a mode hop of a laser source of an 2023
Lithographic apparatus2023
Substrate holder, a lithographic apparatus and method of manufacturing devices2023
Interferometric stage positioning apparatus2022