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Home › Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus

Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus

US Patent 11719529 · Granted Aug 8, 2023

Estimated economic value: $71,129,000 ⓘ

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