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Home › Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system

Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system

US Patent 11525737 · Granted Dec 13, 2022

Estimated economic value: $69,609,000 ⓘ

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