Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › System for positioning an object in lithography

System for positioning an object in lithography

US Patent 9946172 · Granted Apr 17, 2018

Estimated economic value: $13,372,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Motor for a personal care device2025
Imprint apparatus with movable stages2024
Positioning device2024
Lithographic apparatus and device manufacturing method2024
Lithographic apparatus and a method of operating the apparatus2024
Lithographic apparatus2024
Drivetrain assembly for a personal care device2024
Motor for a personal care device2023
Charged particle beam apparatus, and systems and methods for operating the appar2023
Lithographic apparatus and device manufacturing method2023
Stage apparatus suitable for electron beam inspection apparatus2023
Gas mixing for fast temperature control of a cooling hood2023