Transmission line RF applicator for plasma chamber

Assignee

• Applied Materials

Inventors

• Jozef Kudela (27 patents)
• Tsutomu Tanaka (340 patents)
• Carl A. Sorensen (62 patents)
• Suhail Anwar (53 patents)
• John M. White (252 patents)
• Ranjit Indrajit Shinde (3 patents)
• Seon-Mee Cho (34 patents)
• Douglas D. Truong (2 patents)

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