Negative stiffness system for gravity compensation of micropositioner

Assignee

• Shanghai Micro Electronics Equipment (Group) Co.
• Tsinghua University

Inventors

• Yu Zhu (66 patents)
• Ming Zhang (48 patents)
• Zhao Liu (9 patents)
• Rong Cheng (27 patents)
• Jing Wang (16 patents)
• Li Tian (63 patents)
• Dengfeng Xu (29 patents)
• Kaiming Yang (27 patents)
• Jinchun Hu (26 patents)
• Wensheng Yin (23 patents)
• Haihua Mu (14 patents)
• Hao Liu (23 patents)
• Chuxiong Hu (6 patents)

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