Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Coating method for gas delivery system

Coating method for gas delivery system

US Patent 9689533 · Granted Jun 27, 2017

Estimated economic value: $21,606,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Large ship security management system2025
Method and apparatus for measuring particles2025
Plasma processing devices having multi-port valve assemblies2024
Chamber component cleanliness measurement system2024
Conditioning chamber component2024
Substrate support with improved process uniformity2024
Method for conditioning a ceramic coating2022
Moving substrate transfer chamber2022
Method to selectively pattern a surface for plasma resistant coat applications2021
Sensor and adjuster for a consumable2021
Conditioning chamber component2021
Substrate support with improved process uniformity2021