Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Line pattern collapse mitigation through gap-fill material application

Line pattern collapse mitigation through gap-fill material application

US Patent 9454081 · Granted Sep 27, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Wafer bath imaging2025
Bath systems and methods thereof2025
Chemical amplification methods and techniques for developable bottom anti-reflec2024
Chemical amplification methods and techniques for developable bottom anti-reflec2024
Chemical amplification methods and techniques for developable bottom anti-reflec2024
Chemical amplification methods and techniques for developable bottom anti-reflec2024
Methods and systems to monitor, control, and synchronize dispense systems2024
Methods and systems to monitor, control, and synchronize dispense systems2024
Bath systems and methods thereof2023
Systems and methods for spin process video analysis during substrate processing2023
Systems and methods for spin process video analysis during substrate processing2023
Hardware improvements and methods for the analysis of a spinning reflective subs2023