Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Module for ozone cure and post-cure moisture treatment

Module for ozone cure and post-cure moisture treatment

US Patent 9285168 · Granted Mar 15, 2016

Estimated economic value: $10,944,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Extreme uniformity heated substrate support assembly2025
Extreme uniformity heated substrate support assembly2025
Showerhead design to control stray deposition2025
Ion extraction optics having non uniform grid assembly2025
System architecture of manufacturing of semiconductor wafers2025
Semiconductor processing chamber for improved precursor flow2025
Electrostatic chuck with improved temperature control2025
Cylindrical cavity with impedance shifting by irises in a power-supplying wavegu2025
Batch curing chamber with gas distribution and individual pumping2025
Batch curing chamber with gas distribution and individual pumping2025
Batch curing chamber with gas distribution and individual pumping2025
Metal oxide resist patterning with electrical field guided post-exposure bake2025