Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Antireflective coating compositions and processes thereof

Antireflective coating compositions and processes thereof

US Patent 9274426 · Granted Mar 1, 2016

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

PAG-free positive chemically amplified resist composition and methods of using t2025
Novolak/DNQ based, chemically amplified photoresist2025
Rinse and method of use thereof for removing edge protection layers and residual2024
Rinse and method of use thereof for removing edge protection layers and residual2024
Spin-on compositions comprising an inorganic oxide component and an alkynyloxy s2023
Composition of spin-on materials containing metal oxide nanoparticles and an org2022
Composition of spin-on materials containing metal oxide nanoparticles and an org2022
Spin-on inorganic oxide containing composition useful as hard masks and filling 2021
Aromatic amino siloxane functionalized materials for use in capping porous diele2021
Materials containing metal oxides, processes for making same, and processes for 2019
Materials containing metal oxides, processes for making same, and processes for 2019
Metal hardmask composition and processes for forming fine patterns on semiconduc2016