Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability

Spin-on inorganic oxide containing composition useful as hard masks and filling materials with improved thermal stability

US Patent 11042091 · Granted Jun 22, 2021

Estimated economic value: $110,392,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Rinse and method of use thereof for removing edge protection layers and residual2024
Rinse and method of use thereof for removing edge protection layers and residual2024
Spin-on compositions comprising an inorganic oxide component and an alkynyloxy s2023
Composition of spin-on materials containing metal oxide nanoparticles and an org2022
Composition of spin-on materials containing metal oxide nanoparticles and an org2022
Composition of spin-on materials containing metal oxide nanoparticles and an org2022
Materials containing metal oxides, processes for making same, and processes for 2019
Materials containing metal oxides, processes for making same, and processes for 2019
Materials containing metal oxides, processes for making same, and processes for 2019
Metal hardmask composition and processes for forming fine patterns on semiconduc2016
Metal hardmask composition and processes for forming fine patterns on semiconduc2016
Polyoxometalate and heteropolyoxometalate compositions and methods for their use2016