Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Copper residue chamber clean

Copper residue chamber clean

US Patent 9114438 · Granted Aug 25, 2015

Estimated economic value: $10,519,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Translation method and electronic device2025
In-situ low temperature dielectric deposition and selective trim of phase change2025
Redundant bottom pad and sacrificial via contact for process induced RRAM formin2025
Process-induced forming of oxide RRAM2025
Stacked access device and resistive memory2025
Oxide-based resistive memory having a plasma-exposed bottom electrode2025
BEOL fat wire level ground rule compatible embedded artificial intelligence inte2024
Percolation doping of inorganic-organic frameworks for multiple device applicati2024
Percolation doping of inorganic-organic frameworks for multiple device applicati2024
Mitigating moisture driven degradation of silicon doped chalcogenides2024
Plasma co-doping to reduce the forming voltage in resistive random access memory2023
Resistive random-access memory device with step height difference2023